Microlens Integration with Diode Lasers and Coherent Phase Locking ofLaser Arrays
نویسندگان
چکیده
III Novel submillimeter-size lenses have been fabricated in compound semiconductor substrates by mesa etching and heat treatment. These precision large-numerical-aperture microlenses are well suited for diode lasers and laser arrays in miniaturized systems. Alaser array has been efficiently coupled to an external cavity by a microlens array to achieve coherent phase locking. As part of a semiconductor substrate, these microlenses have the potential for monolithic integration with diode lasers and detectors to create reliable integrated optoelectronic systems.
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